Design and fabrication of multi-layers antireflection coating consisting of MgF2 and SiO2

Document Type : Original Article


1 Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran

2 Department of Physics, Shahid Beheshti University, Tehran, Iran

3 Department of Physics, Faculty of Sciences, Arak University, Arak, Iran


In this research, MgF2 and SiO2 thin films were prepared by the magnetron sputtering method on glass and ITO substrates. The crystal structure, morphology, and antireflection performance of the coatings were characterized using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and ultraviolet spectrophotometry (UV-vis) techniques, respectively. Furthermore, by utilizing both experimental characterization and optical film design tools, the best experimental parameters for every coating were identified. FESEM images confirmed proper growth of the layers on the substrates. EDAX analysis revealed that the manufactured layer consisted of Magnesium fluoride and silica. The study of optical properties demonstrated that the average transmission in the 400-1000 nanometer range exceeded 99%, indicating good agreement with theoretical results. Furthermore, the use of ITO as the substrate reduced the bandgap.


Main Subjects

© 2023 The Author(s). Journal of Progress in Physics of Applied Materials published by Semnan University Press. This is an open access article under the CC-BY 4.0 license. (

[1] Xu, Y., Peng, C., Xin, C. and Wu, J., 2013. Preparation of silica antireflective films for solar energy application. Materials Letters, 94, pp.89-91.
[2] Chen, D., 2001. Anti-reflection (AR) coatings made by sol–gel processes: a review. Solar Energy Materials and Solar Cells, 68(3-4), pp.313-336.
[3] Moayedfar, M. and Assadi, M.K., 2018. Various types of anti-reflective coatings (ARCS) based on the layer composition and surface topography: a review. Reviews on Advanced Materials Science, 53(2), pp.187-205.
[4] Macleod, H.A., 2001. Thin-Film Optical Filters (3rd) Florida.
[5] Zhan, F., Li, Z., Shen, X., He, H. and Zeng, J., 2014. Design multilayer antireflection coatings for terrestrial solar cells. The Scientific World Journal, 2014.
[6] Kaminski, P.M., Lisco, F. and Walls, J.M., 2013. Multilayer broadband antireflective coatings for more efficient thin film CdTe solar cells. IEEE Journal of Photovoltaics, 4(1), pp.452-456.
[7] Lien, S.Y., Wuu, D.S., Yeh, W.C. and Liu, J.C., 2006. Tri-layer antireflection coatings (SiO2/SiO2–TiO2/TiO2) for silicon solar cells using a sol–gel technique. Solar Energy Materials and Solar Cells, 90(16), pp.2710-2719.
[8] Du, X., Xing, Y., Zhou, M., Li, X., Huang, H., Meng, X.M., Wen, Y. and Zhang, X., 2018. Broadband antireflective superhydrophilic antifogging nano-coatings based on three-layer system. Microporous and Mesoporous Materials, 255, pp.84-93.
[9Kuhr, M., Bauer, S., Rothhaar, U. and Wolff, D., 2003. Coatings on plastics with the PICVD technology. Thin Solid Films, 442(1-2), pp.107-116.
[10] Romach, M.M., Scherer, G., Eichenberger, J., Lanzafame, J., Glocker, D., Jaszcar, M. and Rayner, B., 2014. Inverted cylindrical magnetron sputtering of optical coatings. 2014 Proceedings of the Society of Vacuum Coaters, pp.233-238.
[11] Hillie, K.T. and Swart, H.C., 2007. Effects of SnO2 surface coating on the degradation of ZnS thin film phosphor. Applied surface science, 253(20), pp.8513-8516.
[12] DeNatale, J.F., Hood, P.J., Flintoff, J.F. and Harker, A.B., 1992. Fabrication and characterization of diamond moth eye antireflective surfaces on Ge. Journal of Applied Physics, 71(3), pp.1388-1393.
[13] Brinker, C.J. and Scherer, G.W., 2013. Sol-gel science: the physics and chemistry of sol-gel processing. Academic press.
[14] Gunasekaran, M., Gopalakrishnan, R. and Ramasamy, P., 2004. Deposition of ZnS thin films by photochemical deposition technique. Materials Letters, 58(1-2), pp.67-70.
[15] Fathy, N., Kobayashi, R. and Ichimura, M., 2004. Preparation of ZnS thin films by the pulsed electrochemical deposition. Materials Science and Engineering: B, 107(3), pp.271-276.
[16] Wang, S., Fu, X., Xia, G., Wang, J., Shao, J. and Fan, Z., 2006. Structure and optical properties of ZnS thin films grown by glancing angle deposition. Applied surface science, 252(24), pp.8734-8737.
[17] Liu, X. and He, J., 2009. One-step hydrothermal creation of hierarchical microstructures toward superhydrophilic and superhydrophobic surfaces. Langmuir, 25(19), pp.11822-11826.
[18] Chen, C.C., Lin, D.J., Don, T.M., Huang, F.H. and Cheng, L.P., 2008. Preparation of organic–inorganic nano-composites for antireflection coatings. Journal of Non-Crystalline Solids, 354(32), pp.3828-3835.
[19] Moghadam, R.Z., Dizagi, H.R., Agren, H. and Ehsani, M.H., 2023. Understanding the effect of Mn2+ on Yb3+/Er3+ co-doped NaYF4 upconversion and obtaining the optimal combination of these tridoping. Scientific Reports, 13(1), p.17556.
[20] Zarei Moghadam R., Taherkhani M., 2022. Oxygen and nitrogen doped diamond-like carbon thin films: A comparative study, Progress in Physics of Applied Materials, 2(2), pp.139-146.
[21] Harris, D.C., 1999. Materials for infrared windows and domes: properties and performance (Vol. 158). SPIE press.
[22] Korkmaz, Ş., Elmas, S., Ekem, N., Pat, S. and Balbağ, M.Z., 2012. Deposition of MgF2 thin films for antireflection coating by using thermionic vacuum arc (TVA). Optics Communications, 285(9), pp.2373-2376.
[23] Gholizadeh, M., Moghadam, R.Z., Mohammadi, A.A., Ehsani, M.H. and Dizaji, H.R., 2020. Design and fabrication of MgF2 single-layer antireflection coating by glancing angle deposition. Materials Research Innovations, 24(7), pp.442-446.
[24] Moghadam, R.Z., Ehsani, M.H., Dizaji, H.R. and Sazideh, M.R., 2018. Thickness Dependence of Structural and Optical Properties of CdTe Films. Iranian Journal of Materials Science & Engineering, 15(3).
[25] Ashrafi, M.M.A., Dizaji, H.R., Ehsani, M.H. and Moghadam, R.Z., 2018. ZnS Film properties modification using oblique angle deposition technique. Surface Review and Letters, 25(06), p.1850119.
[26] Senthamilselvi, V., Ravichandran, K. and Saravanakumar, K., 2013. Influence of immersion cycles on the stoichiometry of CdS films deposited by SILAR technique. Journal of Physics and Chemistry of Solids, 74(1), pp.65-69.
[27] Chen, F., Cao, Y., Jia, D. and Niu, X., 2013. Facile synthesis of CdS nanoparticles photocatalyst with high performance. Ceramics International, 39(2), pp.1511-1517.
[28] Zarei Moghadam, R., Omrany, A.H., Taherkhani, M. and Shokrian, F., 2021. Fabrication of multi-layer antireflection coating consisting of ZnS and MgF2. Progress in Physics of Applied Materials, 1(1), pp.7-13.